MicroNed: History

Microsystem technology

Microsystems technology (MST) has emerged from a combination of IC-processing and conventional miniaturised fabrication technologies. Microsystems have functions in many domains such as electrical, mechanical, chemical, thermal, and/or optical with applications in many areas. Prominent examples of MST products in mass markets are ink jet printer heads, pressure sensors and accelerometers; the total volume in niche markets however is at least of the same size. MST is characterised not only by the small size of the systems, but also by the requirement of a multidisciplinary design approach, the integration of many functions in a single system and the potential of mass fabrication. Altogether, MST promises cost-effective design alternatives and/or new types of functionality.

MST and MicroNed

This program is devoted to the realisation of the new functionalities offered by MST, ready to be implemented in novel commercial products. Research will be done in order to design and realise new types of microsystems on such a level that industry is able to exploit the knowledge by introducing new MST products on the market. At the same time a multidisciplinary technology platform will be built, ranging from fundamental science over engineering science to industrialization. The entire knowledge chain relevant for microsystems will be organised under the umbrella of this programme. Ultimately, the programme will form the basis for innovative products and a new multidisciplinary infrastructure for continuous innovation in MST.

MST in the Netherlands

Work on MST in The Netherlands started as early as the late seventies; the first Transducers conference was organised in Delft in 1983. The Dutch university groups active in the field rank among the world leaders. Within the Netherlands they are absolute technology leaders: the Dutch Technology Foundation STW honoured ten outstanding researchers for their accomplishments by giving them the title of Simon Stevin Masters, seven of which are working in the MST field. From the activities at universities, a number of small innovative MST companies emerged.

The MicroNed consortium

The MicroNed programme has been built upon the expertise and infrastructure of key players in the microsystems field and extended with university groups coming from a wide range of expertise to supplement the existing MST groups. All relevant disciplines are present in the consortium. The new and exciting aspect is that in this programme the link has been made between fabrication technology, component and systems design, fundamental modelling and applications of the technology. The composition of the consortium (33 partners in total) is such that the entire knowledge chain, i.e. the chain from first principles up to commercial-application-oriented research, is represented. The consortium brings together all relevant disciplines at every station of the knowledge chain. As a result, MicroNed brings together (technical) universities, knowledge institutes, enablers and application-oriented companies. Important building blocks are the DIMES and MESA+ research facilities and their research groups and commercial spin-offs. The MicroNed programme is closely lined up with the targets and future research activities of the key players within the consortium.

A multidisciplinary approach

MST in Europe and the United States is very much rooted in electrical engineering. In the application as well as in the design process, borders of the discipline must be crossed to be successful. Accordingly, there is an international trend for MST activities to diffuse to other disciplines where new applications of the technology are being created, explored and exploited. In order to keep up with this trend and to maintain the international high standard of MST in The Netherlands, we need to intensify interdisciplinary collaboration.

Timeline

The first MicroNed proposal was submitted on February 17th 2003. This proposal has been rewritten several times based on comments and suggestions of the KNAW Royal Academy of Science, the Commission of Experts and the Ministry of Economic Affairs.

The definitive proposal was submitted on February 24th 2005 and honoured on April 13th 2005.

The programme is financially supported by Dutch government under the Decree on subsidies for investments in the knowledge infrastructure (Bsik).

The MicroNed programme has started in January 2004 and must be finalised December 2010.